Comment stsetch SNF 2009-05-01 00:33:34: computer problem solved, now He problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri May 1 09:53:38 PDT 2009


Reset the system.  Cycled 3 wafers using the Deep recipe with no problems.  Backside He flow is ~ 2.4 sccm for all 3 wafers.




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