Problem stsetch SNF 2009-05-08 22:59:37: Wafer frag inside chamber
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue May 19 16:39:47 PDT 2009
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Problem stsetch SNF 2009-05-08 22:59:37: Wafer frag inside chamber
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Problem stsetch SNF 2009-05-12 15:32:41: SF6 flow questionable
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Ericp cleaned up chamber
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Problem stsetch SNF 2009-05-08 22:59:37: Wafer frag inside chamber
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Problem stsetch SNF 2009-05-12 15:32:41: SF6 flow questionable
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