Problem stsetch SNF 2009-05-19 17:08:35: Wafer fragment inside chamber

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue May 19 17:08:35 PDT 2009


A fragment broke off my wafer and it's sitting on top of the chuck and the O-ring, so I can't run the machine anymore.




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