Comment stsetch SNF 2009-05-20 18:50:45: SF6 flow check

[eenriquez at snf.stanford.edu]

Check MFC flows using a calibrated flow meter.  
SF6 MFC:
  set point = 130 sccm,  actual = 213 sccm
  set point = 45 sccm, actual = 130 sccm
C4F8 MFC:
  set point = 85 sccm, actual = 86 sccm