Comment stsetch SNF 2009-05-20 18:50:45: SF6 flow check

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed May 20 18:50:46 PDT 2009


Check MFC flows using a calibrated flow meter.  
SF6 MFC:
  set point = 130 sccm,  actual = 213 sccm
  set point = 45 sccm, actual = 130 sccm
C4F8 MFC:
  set point = 85 sccm, actual = 86 sccm




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