Problem stsetch SNF 2009-05-21 09:38:18: reducing SF6 flow did not work

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Thu May 21 09:38:19 PDT 2009


Hi all,
Because of the talk about the SF6 MFC giving too much flow, I set my program so that SF6 flow was half the value before (from 130 sccm to 65 sccm).  The result:  completely charred wafer.  So, think twice before you try the same approach to solve the current SF6 problem.




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