Comment stsetch SNF 2009-05-26 03:24:20: Re: SF6 adjustment

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue May 26 03:24:20 PDT 2009


I tried reducing the SF6 from 130 to 100 and the etch went very well... nice etch profile, nearly vertical sidewalls and nice selectivity.




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