Problem stsetch SNF 2009-05-30 01:18:58: Interlock tripped error

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sat May 30 01:18:59 PDT 2009


Arrived to use machine, found "interlock tripped error" occurred on previous user's wafer.  Previous user's wafer still inside chamber; machine won't let me unload.




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