From shott at snf.stanford.edu Mon Oct 5 14:59:48 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:59:48 -0700 Subject: Problem stsetch SNF 2009-09-01 07:19:27: Check you recipes!!! Message-ID: Hopefully, folks are now checking their recipes more regularly and are not changing the commonly used ones. John From shott at snf.stanford.edu Mon Oct 5 15:00:33 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Oct 2009 15:00:33 -0700 Subject: Problem stsetch SNF 2009-09-19 21:27:33: "interlock tripped" error Message-ID: We have not observed the "interlock tripped" error since this was reported and damodei cleared it. John From shott at snf.stanford.edu Mon Oct 5 15:01:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Oct 2009 15:01:54 -0700 Subject: Problem stsetch SNF 2009-06-26 03:43:50: wafer centering issues worse Message-ID: Wafer centering issue resolved some time ago .... but this problem had fallen off the default 90-day horizon. John From cbaxter at snf.stanford.edu Tue Oct 6 22:21:49 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 6 Oct 2009 22:21:49 -0700 Subject: Comment stsetch SNF 2009-10-06 22:21:49: Adjusted load arm Message-ID: The wafer was off center during loading, Eric and I adjusted the load arm extension. From latta at snf.stanford.edu Thu Oct 8 11:28:55 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:28:55 -0700 Subject: Comment stsetch SNF 2009-09-21 02:11:58: Interlock error fixed Message-ID: archived From mtan at snf.stanford.edu Fri Oct 16 11:58:24 2009 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 16 Oct 2009 11:58:24 -0700 Subject: Problem stsetch SNF 2009-10-16 11:58:24: coil out of tolerance Message-ID: 8 minutes into the run, the machine reports the coil out of tolerance error and stopped the etch From cbaxter at snf.stanford.edu Sun Oct 18 22:21:33 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 Oct 2009 22:21:33 -0700 Subject: Problem stsetch SNF 2009-10-16 11:58:24: coil out of tolerance Message-ID: Ran o2 clean and deepetch recipe, could not duplicate the coil problem error. From rostam at snf.stanford.edu Mon Oct 19 00:25:49 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 19 Oct 2009 00:25:49 -0700 Subject: Problem stsetch SNF 2009-10-19 00:25:49: ICP: coil power out of tolerance Message-ID: red error occured again and the recipe stopped running. coil power out of tolerance. From rostam at snf.stanford.edu Mon Oct 19 00:26:48 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 19 Oct 2009 00:26:48 -0700 Subject: Problem stsetch SNF 2009-10-19 00:26:48: coil power out of tolerance Message-ID: Red error occured again and recipe stopped running. coil power out of tolerance. From eenriquez at snf.stanford.edu Wed Oct 21 08:53:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Oct 2009 08:53:33 -0700 Subject: Problem stsetch SNF 2009-10-19 00:25:49: ICP: coil power out of tolerance Message-ID: No problem found. Ran the Deep recipe with no problems. Next time the problem re-occurs, please record the backside He flow. The flow should be around 2.5 sccm. From eenriquez at snf.stanford.edu Wed Oct 21 08:53:43 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Oct 2009 08:53:43 -0700 Subject: Problem stsetch SNF 2009-10-19 00:26:48: coil power out of tolerance Message-ID: No problem found. Ran the Deep recipe with no problems. Next time the problem re-occurs, please record the backside He flow. The flow should be around 2.5 sccm. From eenriquez at snf.stanford.edu Wed Oct 21 08:54:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Oct 2009 08:54:16 -0700 Subject: Comment stsetch SNF 2009-09-11 18:24:00: RF update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 21 08:54:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Oct 2009 08:54:29 -0700 Subject: Comment stsetch SNF 2009-09-11 19:50:58: DEEP recipe Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 21 08:54:37 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Oct 2009 08:54:37 -0700 Subject: Comment stsetch SNF 2009-10-06 22:21:49: Adjusted load arm Message-ID: Archived From malekos at snf.stanford.edu Sun Oct 25 11:42:37 2009 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Sun, 25 Oct 2009 11:42:37 -0700 Subject: Problem stsetch SNF 2009-10-25 11:42:37: Aluminum wafer holder Message-ID: The top portion of the aluminum wafer holder seems to be slighlty bent. Although, I was still able to use it without any porblems. From cbaxter at snf.stanford.edu Sun Oct 25 11:50:53 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 25 Oct 2009 11:50:53 -0700 Subject: Problem stsetch SNF 2009-10-25 11:42:37: Aluminum wafer holder Message-ID: Wafer holder is ok to us...