Problem stsetch SNF 2009-10-19 00:25:49: ICP: coil power out of tolerance

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 21 08:53:33 PDT 2009


No problem found.  Ran the Deep recipe with no problems.  
Next time the problem re-occurs, please record the backside He flow.  The flow should be around 2.5 sccm.   




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