Shutdown stsetch SNF 2009-09-02 07:36:53: Performing PM

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 2 18:43:52 PDT 2009


Completed the PM.  Cleaned all the ceramic parts including the chamber.  Rebuilt the clamp assembly. Replaced upper and lower chamber orings and also the lip seal oring.  Checked the turbo pump foreline (95% clear).
Leak rate before the PM = 0.3 mT/min,:  After the PM= 0.5 mT/min
Performed He leak test before and after the PM-- found no leak
Peformed gas flow verification using a calibrated Mass flow meter.
-- C4F8 was about 3% lower than indicated on the screen
-- SF6 was about  4-5% lower than indicated on the screen.  The SF6 flow also became unstable when I tried to flow more than 150 sccm (most recipes flow 130 sccm)




More information about the stsetch-pcs mailing list