Problem stsetch SNF 2009-09-04 20:11:02: silicon:oxide selectivity is still bad

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Fri Sep 4 20:11:02 PDT 2009


I did two etches today.  I confirm that oxide etch rate is too fast and silicon etch rate is too slow.  I need SNF to experiment with the butterfly valve setting so that the processing pressure is selected correctly for this powerful turbo pump - if this is the reason for the problem that I see.  For now I have released my process time.




More information about the stsetch-pcs mailing list