Problem stsetch SNF 2009-09-04 20:11:02: silicon:oxide selectivity is still bad

quickwin at quickwin at
Fri Sep 4 20:11:02 PDT 2009

I did two etches today.  I confirm that oxide etch rate is too fast and silicon etch rate is too slow.  I need SNF to experiment with the butterfly valve setting so that the processing pressure is selected correctly for this powerful turbo pump - if this is the reason for the problem that I see.  For now I have released my process time.

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