Shutdown stsetch SNF 2009-09-07 21:45:37: compressed air failure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Sep 8 11:21:35 PDT 2009


Replaced the defective connector.  Unloaded the wafer that was stranded in the chamber.  User's wafer is now in the loadlock.




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