Comment stsetch SNF 2009-09-11 18:24:00: RF update

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Sep 11 18:24:00 PDT 2009


Elmer disconnected a capacitor on the coil that he had repaired at the last major PM.  At that time, it was apparent the cap had been broken for some time.  However, this also seems to correlate with increased reflected power.  He removed the cap this morning and the reflected power controls nicely to zero.
Nancy did an etch rate and the process does not seem to be obviously improved.  The reflected power, though, behaves very nicely now.
Jim and John are troubleshooting the system.  A problem was observed with the platen power -- this was traced to the bypass box, which has been removed for now.
The system is OK to use, but troubleshooting will continue next week.




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