Comment stsetch SNF 2009-09-12 09:33:27: coil out of tolerance
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Sep 14 10:18:13 PDT 2009
Found the SOI control box was not functioning. Removed the box out the platten power control loop. Ran the Deep recipe with no problems.
Gave the SOI box to Gary Y. for safe keeping.
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