Shutdown stsetch SNF 2009-09-27 08:47:51: please adjust wafer carrier position

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Sun Sep 27 08:47:52 PDT 2009


the 8-sided big aluminum wafer carrier is off to one side, and as a result when wafers go in they are clamped off center.  People have been putting the wafers not in the center of the wafer carrier so that when the wafers are centered during etch.  This is probably the reason for the broken wafer.  So please fix the machine right by fixing the aluminum wafer carrier position.




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