Comment stsetch SNF 2009-09-28 15:33:55: Update broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 28 15:33:56 PDT 2009


Cleaned chamber and loadlock.  Still some wafer pieces around the chamber door.  Need to finish cleaning and adjust  the wafer hand-off.




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