Comment stsetch SNF 2009-09-29 15:23:17: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Sep 29 15:23:17 PDT 2009


Completed cleaning the chamber  and load lock.  Found out that the chamber door seal is leaking and also the wafer lift pin coupler is broken.
Checking for parts availability.




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