Comment stsetch SNF 2009-09-29 15:23:17: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Sep 29 15:23:17 PDT 2009
Completed cleaning the chamber and load lock. Found out that the chamber door seal is leaking and also the wafer lift pin coupler is broken.
Checking for parts availability.
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