Shutdown stsetch SNF 2009-09-26 23:45:41: wafer broke inside system

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 30 19:08:54 PDT 2009


Cleaned the chamber and loadlock.  Replaced the wafer lift pneumatic coupler.  Replaced one ceramic clamp.  
Cycled wafers and ran an O2 plasma.




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