Shutdown stsetch SNF 2009-09-27 08:47:51: please adjust wafer carrier position

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 30 19:10:21 PDT 2009


Cleaned the chamber and loadlock.  Replaced the wafer lift pneumatic coupler.  Replaced one ceramic clamp.  
Cycled wafers and ran an O2 plasma.
We'll adjust the wafer process position during the next PM.




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