September 2009 Archives by thread

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Starting: Tue Sep 1 07:17:56 PDT 2009
Ending: Wed Sep 30 19:13:06 PDT 2009
Messages: 47

• Problem stsetch SNF 2009-09-01 07:17:55: Coil ref pw jumpy   latta at snf.stanford.edu
  • Problem stsetch SNF 2009-09-01 07:17:55: Coil ref pw jumpy   shott at snf.stanford.edu
• Problem stsetch SNF 2009-09-01 07:19:27: Check you recipes!!!   latta at snf.stanford.edu
• Shutdown stsetch SNF 2009-09-02 07:36:53: Performing PM   eenriquez at snf.stanford.edu
  • Shutdown stsetch SNF 2009-09-02 07:36:53: Performing PM   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-09-02 11:15:32: Update   eenriquez at snf.stanford.edu
  • Comment stsetch SNF 2009-09-02 11:15:32: Update   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-07-10 15:07:46: Update system lockup   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-07-08 03:09:44: standby mode: pumping out   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-09-03 09:59:01: Quals before and after chamber clean & PM   latta at snf.stanford.edu
• Problem stsetch SNF 2009-09-04 20:11:02: silicon:oxide selectivity is still bad   quickwin at snf.stanford.edu
  • Problem stsetch SNF 2009-09-04 20:11:02: silicon:oxide selectivity is still bad   shott at snf.stanford.edu
• Problem stsetch SNF 2009-09-04 22:35:37: maybe the RF sources are out of spec?   quickwin at snf.stanford.edu
  • Problem stsetch SNF 2009-09-04 22:35:37: maybe the RF sources are out of spec?   shott at snf.stanford.edu
• Shutdown stsetch SNF 2009-09-07 21:45:37: compressed air failure   ericp at snf.stanford.edu
  • Shutdown stsetch SNF 2009-09-07 21:45:37: compressed air failure   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-09-11 17:23:23: Monitor results, before and after capacitor   latta at snf.stanford.edu
• Comment stsetch SNF 2009-09-11 18:24:00: RF update   mtang at snf.stanford.edu
• Comment stsetch SNF 2009-09-11 19:50:58: DEEP recipe   mtang at snf.stanford.edu
• Problem stsetch SNF 2009-09-12 08:44:32: coil out of tolerance   mtan at snf.stanford.edu
  • Problem stsetch SNF 2009-09-12 08:44:32: coil out of tolerance   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-09-12 09:33:27: coil out of tolerance   mtan at snf.stanford.edu
  • Comment stsetch SNF 2009-09-12 09:33:27: coil out of tolerance   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2009-09-12 18:13:37: no platen power at all   quickwin at snf.stanford.edu
  • Shutdown stsetch SNF 2009-09-12 18:13:37: no platen power at all   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-09-15 05:43:21: icp not available alarm   mtan at snf.stanford.edu
  • Problem stsetch SNF 2009-09-15 05:43:21: icp not available alarm   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-09-15 05:47:35: system was not left in a pumped down state   mtan at snf.stanford.edu
  • Problem stsetch SNF 2009-09-15 05:47:35: system was not left in a pumped down state   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2009-09-15 07:54:03: broken wafer inside   mtan at snf.stanford.edu
  • Shutdown stsetch SNF 2009-09-15 07:54:03: broken wafer inside   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-05-28 09:23:31: High reflected power on SF6 cycle   shott at snf.stanford.edu
• Problem stsetch SNF 2009-08-08 15:35:23: bad etch   shott at snf.stanford.edu
• Comment stsetch SNF 2009-06-06 18:02:01: DEEP recipe coil reflected power high   shott at snf.stanford.edu
• Comment stsetch SNF 2009-06-07 13:40:08: high reflected coil power on other recipes   shott at snf.stanford.edu
• Problem stsetch SNF 2009-08-13 10:51:43: bad etch again   shott at snf.stanford.edu
• Problem stsetch SNF 2009-09-19 21:27:33: "interlock tripped" error   quickwin at snf.stanford.edu
• Comment stsetch SNF 2009-09-21 02:11:58: Interlock error fixed   damodei at snf.stanford.edu
• Shutdown stsetch SNF 2009-09-26 23:45:41: wafer broke inside system   quickwin at snf.stanford.edu
  • Shutdown stsetch SNF 2009-09-26 23:45:41: wafer broke inside system   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2009-09-27 08:47:51: please adjust wafer carrier position   quickwin at snf.stanford.edu
  • Shutdown stsetch SNF 2009-09-27 08:47:51: please adjust wafer carrier position   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-09-28 15:33:55: Update broken wafer   eenriquez at snf.stanford.edu
  • Comment stsetch SNF 2009-09-28 15:33:55: Update broken wafer   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-09-29 15:23:17: Update   eenriquez at snf.stanford.edu
  • Comment stsetch SNF 2009-09-29 15:23:17: Update   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-08-22 18:24:04: Plasma flickering a lot during passivation   eenriquez at snf.stanford.edu

Last message date: Wed Sep 30 19:13:06 PDT 2009
Archived on: Fri Jan 11 13:11:22 PST 2013

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