August 2010 Archives by thread

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Starting: Sun Aug 1 11:16:44 PDT 2010
Ending: Tue Aug 31 15:26:52 PDT 2010
Messages: 29

• Problem stsetch SNF 2010-08-01 11:16:44: lock pumpdown alarm   jwpchen at snf.stanford.edu
  • Problem stsetch SNF 2010-08-01 11:16:44: lock pumpdown alarm   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-07-31 07:39:03: transfer chamber pump slow   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-31 07:42:55: transfer chamber leak rate   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-29 09:23:33: Tested OK after power outtage   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-07-28 18:37:11: software issue again   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-23 07:48:01: Update cover interlock   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-07-21 18:33:45: Cover interlock occasionally misreads OPEN   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-21 09:47:14: He flow check   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-07-19 01:06:44: cover door issues again   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-13 15:33:57: Update He flow   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-07-03 09:13:40: Communication error   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-07-02 23:06:58: He flow very unstable   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-08-11 12:27:48: Monthly PM completed   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-08-17 10:25:45: eating resist, not silicon!   jpadovani at snf.stanford.edu
  • Problem stsetch SNF 2010-08-17 10:25:45: eating resist, not silicon!   latta at snf.stanford.edu
• Comment stsetch SNF 2010-08-17 13:52:55: Update eating resist   eenriquez at snf.stanford.edu
  • Comment stsetch SNF 2010-08-17 13:52:55: Update eating resist   latta at snf.stanford.edu
• Comment stsetch SNF 2010-08-18 18:54:56: Update eating resist   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-08-19 14:45:08: Resist is etching faster during long runs   latta at snf.stanford.edu
  • Problem stsetch SNF 2010-08-19 14:45:08: Resist is etching faster during long runs   latta at snf.stanford.edu
• Comment stsetch SNF 2010-08-20 15:58:34: Quals before and after lip seal replacement   latta at snf.stanford.edu
• Comment stsetch SNF 2010-08-20 16:17:00: Results for PR etch rate tests   latta at snf.stanford.edu
• Problem stsetch SNF 2010-08-23 16:53:52: Check Etch Rates   mtang at snf.stanford.edu
• Comment stsetch SNF 2010-08-27 09:19:41: Test wafer results   nharjee at snf.stanford.edu
• Comment stsetch SNF 2010-08-28 10:04:05: Update?   nharjee at snf.stanford.edu
• Comment stsetch SNF 2010-08-28 18:14:50: APC setpoint for DEEP recipe   nharjee at snf.stanford.edu
• Problem stsetch SNF 2010-08-29 22:15:03: DO NOT CHANGE STANDARD RECIPES!   ericp at snf.stanford.edu
• Comment stsetch SNF 2010-08-31 15:26:52: Check Your Recipes!   latta at snf.stanford.edu

Last message date: Tue Aug 31 15:26:52 PDT 2010
Archived on: Fri Jan 11 13:11:25 PST 2013

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