From latta at snf.stanford.edu Wed Dec 1 17:49:47 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Dec 2010 17:49:47 -0800 Subject: Shutdown stsetch SNF 2010-11-29 10:44:21: Unstable sF6 flow Message-ID: liquid removed and SF6 flow is stable. From latta at snf.stanford.edu Wed Dec 1 17:52:41 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Dec 2010 17:52:41 -0800 Subject: Comment stsetch SNF 2010-12-01 17:52:40: Quick qual after chamber clean Message-ID: I ran three wafers with the following results; 1 Si ER =1.69um/min 2- Si ER = 1.77 3- Si ER = 1.82 All had a steady ER for PR of 200A/min This may mean that with more use the ER for Si may increase. From eenriquez at snf.stanford.edu Wed Dec 1 18:19:18 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Dec 2010 18:19:18 -0800 Subject: Comment stsetch SNF 2010-11-29 15:11:07: Update SF6 flow Message-ID: Archived From eenriquez at snf.stanford.edu Wed Dec 1 18:19:26 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Dec 2010 18:19:26 -0800 Subject: Comment stsetch SNF 2010-11-30 14:48:07: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Dec 1 18:27:43 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Dec 2010 18:27:43 -0800 Subject: Problem stsetch SNF 2010-11-29 03:26:41: SF6 tolerance error Message-ID: Pumped down the SF6 and lowered the incoming gas pressure to 15 psi. Now gas flow even near the maximum flow is very stable. Also cleaned the chamber, replaced the lid oring and lip seal. From eenriquez at snf.stanford.edu Wed Dec 1 18:28:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Dec 2010 18:28:29 -0800 Subject: Comment stsetch SNF 2010-11-23 10:12:29: Update grass problem Message-ID: Compled the chamber wet clean. From eenriquez at snf.stanford.edu Wed Dec 1 18:36:18 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Dec 2010 18:36:18 -0800 Subject: Comment stsetch SNF 2010-12-01 18:36:17: Update grass problem Message-ID: Found two of the screws that suppor the clamp fingers had lost their teflon cap (worn through). Exposed metal is a possible cause for grassing. From eenriquez at snf.stanford.edu Fri Dec 3 10:55:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Dec 2010 10:55:30 -0800 Subject: Comment stsetch SNF 2010-12-03 10:55:30: Completed Monthly PM Message-ID: From ehsans at snf.stanford.edu Mon Dec 6 00:41:53 2010 From: ehsans at snf.stanford.edu (ehsans at snf.stanford.edu) Date: Mon, 6 Dec 2010 00:41:53 -0800 Subject: Comment stsetch SNF 2010-12-06 00:41:52: Grass Issue is Worse than Before Message-ID: I used the smooshal rececipe. After a 25 minute etch I got some grass, which led me to do a 20 minute O2 clean. I then ran the smooshal recipe again for 25 minutes, and the grass was much worse than before. I did not get this level of grass a couple of weeks ago before the maintenance, and an O2 clean would usually resolve the grass issue enough to etch a few wafers. From eszilagy at snf.stanford.edu Fri Dec 10 16:00:50 2010 From: eszilagy at snf.stanford.edu (eszilagy at snf.stanford.edu) Date: Fri, 10 Dec 2010 16:00:50 -0800 Subject: Problem stsetch SNF 2010-12-10 16:00:49: grass on whole wafer Message-ID: After etching for 4 h with 7 um resist, the entirety of the wafer was coated in grass. The wafer was in the holder with a support wafer. From pnataraj at snf.stanford.edu Sun Dec 12 15:55:50 2010 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 12 Dec 2010 15:55:50 -0800 Subject: Problem stsetch SNF 2010-12-12 15:55:49: broke my wafer in the chamber Message-ID: I was only in to 100micron deep on a 500micron wafer. I am very sorry!! From ericp at snf.stanford.edu Mon Dec 13 02:55:20 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 13 Dec 2010 02:55:20 -0800 Subject: Comment stsetch SNF 2010-12-13 02:55:20: cleared broken wafer Message-ID: I cleared Pradeep's broken wafer. Leakrate measures <2mT/min, without plasma. So, it should be good to go. From eenriquez at snf.stanford.edu Mon Dec 13 07:55:39 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Dec 2010 07:55:39 -0800 Subject: Problem stsetch SNF 2010-12-12 15:55:49: broke my wafer in the chamber Message-ID: User cleared broken wafer. From eenriquez at snf.stanford.edu Mon Dec 13 07:55:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Dec 2010 07:55:47 -0800 Subject: Comment stsetch SNF 2010-12-13 02:55:20: cleared broken wafer Message-ID: Archived From pnataraj at snf.stanford.edu Mon Dec 13 08:09:15 2010 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Mon, 13 Dec 2010 08:09:15 -0800 Subject: Comment stsetch SNF 2010-12-13 08:09:14: broken wafer removed Message-ID: Eric helped us to clear the broken wafer From eenriquez at snf.stanford.edu Tue Dec 14 14:42:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Dec 2010 14:42:17 -0800 Subject: Comment stsetch SNF 2010-12-13 08:09:14: broken wafer removed Message-ID: Archived From sclaussen at snf.stanford.edu Tue Dec 14 16:14:00 2010 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 14 Dec 2010 16:14:00 -0800 Subject: Problem stsetch SNF 2010-12-14 16:13:59: Monitor dead Message-ID: I had just started a process when I got an error along the lines of "Coil temperature out of tolerance." Then, as I was unloading and venting the wafer, I walked away for a minute and returned to the monitor being completely blank. Nancy tried to reboot the system, but it didn't seem to help. From damodei at snf.stanford.edu Tue Dec 14 23:11:20 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 14 Dec 2010 23:11:20 -0800 Subject: Comment stsetch SNF 2010-12-14 23:11:20: monitor problem fixed Message-ID: The problem is the monitor itself, I have instituted a temporary fix by borrowing the monitor from the (rarely used) old ALD, with permission from Mary Tang. Staff will try to find a more permanent solution tomorrow.