Comment stsetch SNF 2010-12-01 17:52:40: Quick qual after chamber clean

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Dec 1 17:52:41 PST 2010


I ran three wafers with the following results; 
1 Si ER =1.69um/min
2- Si ER = 1.77
3- Si ER = 1.82
All had a steady ER for PR of 200A/min
This may mean that with more use the ER for Si may increase.




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