Comment stsetch SNF 2010-12-06 00:41:52: Grass Issue is Worse than Before

ehsans at snf.stanford.edu ehsans at snf.stanford.edu
Mon Dec 6 00:41:53 PST 2010


I used the smooshal rececipe. After a 25 minute etch I got some grass, which led me to do a 20 minute O2 clean. I then ran the smooshal recipe again for 25 minutes, and the grass was much worse than before. I did not get this level of grass a couple of weeks ago before the maintenance, and an O2 clean would usually resolve the grass issue enough to etch a few wafers.




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