Problem stsetch SNF 2010-12-10 16:00:49: grass on whole wafer

eszilagy at eszilagy at
Fri Dec 10 16:00:50 PST 2010

After etching for 4 h with 7 um resist, the entirety of the wafer was coated in grass. The wafer was in the holder with a support wafer. 

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