Problem stsetch SNF 2010-12-14 16:13:59: Monitor dead

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Tue Dec 14 16:14:00 PST 2010


I had just started a process when I got an error along the lines of "Coil temperature out of tolerance." Then, as I was unloading and venting the wafer, I walked away for a minute and returned to the monitor being completely blank.
Nancy tried to reboot the system, but it didn't seem to help.




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