From eenriquez at snf.stanford.edu Fri Feb 5 15:14:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 5 Feb 2010 15:14:56 -0800 Subject: Comment stsetch SNF 2010-02-05 15:14:55: Update Message-ID: Installed new Helium backside controller but the controller is a newer revision so it looks like its going to need an addition jumper plug to make it functional. Waiting for the jumper pin-out information from STS. From eenriquez at snf.stanford.edu Mon Feb 8 11:26:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:26:56 -0800 Subject: Shutdown stsetch SNF 2010-01-19 11:47:29: High He cooling flow Message-ID: Replaced HBC1 controller. Installed jumper plug to make the new version of the controller work with our system. From eenriquez at snf.stanford.edu Mon Feb 8 11:27:15 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:27:15 -0800 Subject: Comment stsetch SNF 2010-01-19 14:46:28: Update He cooling Message-ID: Archive From eenriquez at snf.stanford.edu Mon Feb 8 11:27:20 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:27:20 -0800 Subject: Comment stsetch SNF 2010-01-20 17:51:38: Update Message-ID: Archive From eenriquez at snf.stanford.edu Mon Feb 8 11:27:25 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:27:25 -0800 Subject: Comment stsetch SNF 2010-01-24 10:36:39: Update Message-ID: Archive From eenriquez at snf.stanford.edu Mon Feb 8 11:27:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:27:29 -0800 Subject: Comment stsetch SNF 2010-01-29 16:00:59: Update Message-ID: Archive From eenriquez at snf.stanford.edu Mon Feb 8 11:27:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:27:35 -0800 Subject: Comment stsetch SNF 2010-02-05 15:14:55: Update Message-ID: Archive From barlian at snf.stanford.edu Tue Feb 9 02:05:15 2010 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Tue, 9 Feb 2010 02:05:15 -0800 Subject: Problem stsetch SNF 2010-02-09 02:05:14: C4F8 out of tolerance Message-ID: I was able to etch my wafer for 2 hours without any problem until it gave me this error. From eenriquez at snf.stanford.edu Tue Feb 9 14:59:15 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Feb 2010 14:59:15 -0800 Subject: Problem stsetch SNF 2010-02-09 02:05:14: C4F8 out of tolerance Message-ID: Reset the C4F8 cylinder switch-over controller. From xzhuan1 at snf.stanford.edu Tue Feb 9 19:20:01 2010 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Tue, 9 Feb 2010 19:20:01 -0800 Subject: Problem stsetch SNF 2010-02-09 19:20:00: wafer broken in chamber Message-ID: From ericp at snf.stanford.edu Tue Feb 9 22:11:29 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 9 Feb 2010 22:11:29 -0800 Subject: Comment stsetch SNF 2010-02-09 22:11:28: broken wafer cleared, ok to use Message-ID: I've cleared the user's broken wafer. Found one clamp arm loose, retightened. wipe, O2, season. Leakrate is <1mT/min with lock pumped, about 2.5mT/min with lock vented. Machine is ready to go..... ok to use. From eenriquez at snf.stanford.edu Wed Feb 10 13:48:26 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Feb 2010 13:48:26 -0800 Subject: Problem stsetch SNF 2010-02-09 19:20:00: wafer broken in chamber Message-ID: Eric P cleaned the chamber and ran test From eenriquez at snf.stanford.edu Wed Feb 10 13:48:46 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Feb 2010 13:48:46 -0800 Subject: Comment stsetch SNF 2010-02-09 22:11:28: broken wafer cleared, ok to use Message-ID: Archive From xzhuan1 at snf.stanford.edu Wed Feb 10 14:51:39 2010 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 10 Feb 2010 14:51:39 -0800 Subject: Problem stsetch SNF 2010-02-10 14:51:39: resist burning Message-ID: 10 um resist burned after 50 min deep etching! previous user had the same problem. From rik at snf.stanford.edu Wed Feb 10 22:51:07 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 10 Feb 2010 22:51:07 -0800 Subject: Problem stsetch SNF 2010-02-10 22:51:06: Resist burnt Message-ID: Had same problem as previous users. Resist burnt off during through wafer etch. From eenriquez at snf.stanford.edu Thu Feb 11 09:29:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Feb 2010 09:29:53 -0800 Subject: Shutdown stsetch SNF 2010-02-11 09:29:52: No He cooling flow to wfr Message-ID: No He cooling flow to the wafer. Cooling flow and pressure are OK but the He is not making it to the wafer. From eenriquez at snf.stanford.edu Thu Feb 11 15:22:41 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Feb 2010 15:22:41 -0800 Subject: Comment stsetch SNF 2010-02-11 15:22:41: Update Message-ID: Backside He valve and the line from the valve to the electrode are OK but no gas going to the electrode. Still need further troubleshooting. From eenriquez at snf.stanford.edu Tue Feb 16 10:35:32 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Feb 2010 10:35:32 -0800 Subject: Shutdown stsetch SNF 2010-02-11 09:29:52: No He cooling flow to wfr Message-ID: Replaced backside helium final valve. Ran 10 min O2 clean. From eenriquez at snf.stanford.edu Tue Feb 16 10:35:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Feb 2010 10:35:38 -0800 Subject: Comment stsetch SNF 2010-02-11 15:22:41: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Feb 16 10:37:20 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Feb 2010 10:37:20 -0800 Subject: Problem stsetch SNF 2010-02-16 10:37:19: Needs a qual Message-ID: Please run a process qual to verify that the cooling problem (resist burning) has been repaired. From latta at snf.stanford.edu Tue Feb 16 14:25:26 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:25:26 -0800 Subject: Comment stsetch SNF 2010-02-16 14:25:26: resist burning check Message-ID: after 45 min etch resist looks good..... From latta at snf.stanford.edu Tue Feb 16 14:25:50 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:25:50 -0800 Subject: Problem stsetch SNF 2010-02-16 10:37:19: Needs a qual Message-ID: verfied and lookin good From latta at snf.stanford.edu Tue Feb 16 14:26:32 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:26:32 -0800 Subject: Problem stsetch SNF 2010-02-10 14:51:39: resist burning Message-ID: looks good now after 45 mins.... From eenriquez at snf.stanford.edu Mon Feb 22 07:57:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Feb 2010 07:57:36 -0800 Subject: Problem stsetch SNF 2010-02-10 22:51:06: Resist burnt Message-ID: Replaced backside He cooling valve From chen0622 at snf.stanford.edu Thu Feb 25 08:11:11 2010 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Thu, 25 Feb 2010 08:11:11 -0800 Subject: Problem stsetch SNF 2010-02-25 08:11:11: load lock pumping down very slowly Message-ID: From cbaxter at snf.stanford.edu Sat Feb 27 09:01:15 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 27 Feb 2010 09:01:15 -0800 Subject: Problem stsetch SNF 2010-02-25 08:11:11: load lock pumping down very slowly Message-ID: Cleaned the lid o-ring and pumped down l/l w/out problem..