Problem stsetch SNF 2010-02-09 19:20:00: wafer broken in chamber
xzhuan1 at snf.stanford.edu
xzhuan1 at snf.stanford.edu
Tue Feb 9 19:20:01 PST 2010
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Problem stsetch SNF 2010-02-09 02:05:14: C4F8 out of tolerance
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Problem stsetch SNF 2010-02-09 19:20:00: wafer broken in chamber
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Problem stsetch SNF 2010-02-09 19:20:00: wafer broken in chamber
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