Shutdown stsetch SNF 2010-02-11 09:29:52: No He cooling flow to wfr

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Feb 11 09:29:53 PST 2010


No He cooling flow to the wafer.  Cooling flow and pressure are OK but the He is not making it to the wafer.  




More information about the stsetch-pcs mailing list