From eenriquez at snf.stanford.edu Mon Jan 4 15:05:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:05:24 -0800 Subject: Comment stsetch SNF 2010-01-04 15:05:24: Test OK Message-ID: Ran the Deep and the O2 clean recipe with no problems. From mtang at snf.stanford.edu Tue Jan 5 12:57:20 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 5 Jan 2010 12:57:20 -0800 Subject: Comment stsetch SNF 2010-01-05 12:57:20: Coil error and log files Message-ID: Ran several wafers, one of which experienced a coil error. Resumed the process without any problem. The logfile seemed to indicate that there was no RF power; however, the times on the logfile were not correct. On the third wafer, no logfile seems to have been created. It may be time to backup and purge some old logfiles. From latta at snf.stanford.edu Thu Jan 7 12:08:19 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 12:08:19 -0800 Subject: Comment stsetch SNF 2009-11-03 09:20:13: Completed Monthly PM Message-ID: archived From latta at snf.stanford.edu Thu Jan 7 12:08:29 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 12:08:29 -0800 Subject: Comment stsetch SNF 2009-11-30 23:56:10: Test results Message-ID: archived From latta at snf.stanford.edu Thu Jan 7 12:08:43 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 12:08:43 -0800 Subject: Comment stsetch SNF 2009-12-11 11:27:09: Completed monthly PM Message-ID: archived From latta at snf.stanford.edu Thu Jan 7 12:08:52 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 12:08:52 -0800 Subject: Comment stsetch SNF 2010-01-04 15:05:24: Test OK Message-ID: archived From latta at snf.stanford.edu Thu Jan 7 12:10:52 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 12:10:52 -0800 Subject: Comment stsetch SNF 2010-01-07 12:10:52: Qual after annual shutdown Message-ID: DEEP for 00:10:00 Si ER = 2.41um/min PR ER = 262A/min Sel Si : PR = 92 : 1 From barlian at snf.stanford.edu Thu Jan 7 16:45:00 2010 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Thu, 7 Jan 2010 16:45:00 -0800 Subject: Problem stsetch SNF 2010-01-07 16:45:00: screen unrecognizable Message-ID: i didn't get to use i didn't know how to escape From cbaxter at snf.stanford.edu Mon Jan 11 01:22:30 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 11 Jan 2010 01:22:30 -0800 Subject: Problem stsetch SNF 2010-01-07 16:45:00: screen unrecognizable Message-ID: Reboot system.. From eenriquez at snf.stanford.edu Tue Jan 19 11:47:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:47:29 -0800 Subject: Shutdown stsetch SNF 2010-01-19 11:47:29: High He cooling flow Message-ID: Need to replace the chuck o-ring. From eenriquez at snf.stanford.edu Tue Jan 19 14:46:28 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Jan 2010 14:46:28 -0800 Subject: Comment stsetch SNF 2010-01-19 14:46:28: Update He cooling Message-ID: He flow is still high afte chuck lip seal was replaced. Also, the backside pressure reads -12 mT (setpoint = 9.9). Looks like the electrode assembly is leaking. The electrode assembly might need to be rebuilt From eenriquez at snf.stanford.edu Wed Jan 20 17:51:39 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jan 2010 17:51:39 -0800 Subject: Comment stsetch SNF 2010-01-20 17:51:38: Update Message-ID: Backside He manometer reads -12 T when under vacuum. Ordered new manometer. Should be here by Friday. From cbaxter at snf.stanford.edu Sun Jan 24 10:36:40 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 24 Jan 2010 10:36:40 -0800 Subject: Comment stsetch SNF 2010-01-24 10:36:39: Update Message-ID: The He nupro valve is not opening, it looks like the HBC controller is bad?. From eenriquez at snf.stanford.edu Fri Jan 29 16:01:01 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 16:01:01 -0800 Subject: Comment stsetch SNF 2010-01-29 16:00:59: Update Message-ID: Jim McVitte is troubleshooting the backside He controller.