Comment stsetch SNF 2010-01-05 12:57:20: Coil error and log files

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Jan 5 12:57:20 PST 2010


Ran several wafers, one of which experienced a coil error.  Resumed the process without any problem.  The logfile seemed to indicate that there was no RF power; however, the times on the logfile were not correct.  On the third wafer, no logfile seems to have been created.  It may be time to backup and purge some old logfiles.




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