Comment stsetch SNF 2010-01-07 12:10:52: Qual after annual shutdown

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jan 7 12:10:52 PST 2010

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DEEP for 00:10:00
Si ER = 2.41um/min
PR ER = 262A/min
Sel Si : PR = 92 : 1

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