July 2010 Archives by subject

• Messages sorted by: [ thread ] [ author ] [ date ]
• More info on this list...

Starting: Fri Jul 2 23:06:58 PDT 2010
Ending: Sat Jul 31 07:42:56 PDT 2010
Messages: 41

• Comment stsetch SNF 2010-05-14 16:20:25: Re: load lock cover sensor erratic behavior   latta at snf.stanford.edu
• Comment stsetch SNF 2010-05-19 04:22:56: Coil power out of tolerance error   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-05-23 16:35:15: Etch observations   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-05-27 15:02:52: Late May Qual- ER low   latta at snf.stanford.edu
• Comment stsetch SNF 2010-06-08 12:02:10: Qual after FSE   latta at snf.stanford.edu
• Comment stsetch SNF 2010-06-15 16:37:21: Qual after He repair and clamp dot replaced   latta at snf.stanford.edu
• Comment stsetch SNF 2010-06-21 00:22:32: somebody's devices scattered in machine   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-06-21 04:23:13: pieces in chamber   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-05 23:13:52: restarted-- ok   ericp at snf.stanford.edu
• Comment stsetch SNF 2010-07-05 23:13:52: restarted-- ok   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-07 20:54:49: Update Helium flow problem   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-07 20:54:49: Update Helium flow problem   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-09 12:21:27: Qual after He valve adjustment   latta at snf.stanford.edu
• Comment stsetch SNF 2010-07-12 09:49:04: SF6 MFC   jwpchen at snf.stanford.edu
• Comment stsetch SNF 2010-07-12 09:49:04: SF6 MFC   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-13 15:33:57: Update He flow   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-13 16:34:26: Qual after He adjust   latta at snf.stanford.edu
• Comment stsetch SNF 2010-07-15 08:56:16: He flow check   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-15 08:56:16: He flow check   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-21 09:47:14: He flow check   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-23 07:48:01: Update cover interlock   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-25 10:07:18: SF6 MFC normal   jwpchen at snf.stanford.edu
• Comment stsetch SNF 2010-07-25 10:07:18: SF6 MFC normal   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-29 09:23:33: Tested OK after power outtage   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-07-31 07:42:55: transfer chamber leak rate   jwpchen at snf.stanford.edu
• Problem stsetch SNF 2010-05-06 10:08:36: High cooling He flow   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-05-08 16:46:42: flow fluctuation   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-05-10 16:24:02: More troubles with backside He   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-05-10 22:16:27: He flow fluctuation   latta at snf.stanford.edu
• Problem stsetch SNF 2010-06-14 14:48:07: More details of etch nonuniformity ....   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-06-21 14:40:21: He flow fluctuates 3.5~6.5   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-06-26 05:53:47: SF6 MFC unstable   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-07-02 23:06:58: He flow very unstable   ericp at snf.stanford.edu
• Problem stsetch SNF 2010-07-03 09:13:40: Communication error   zappe at snf.stanford.edu
• Problem stsetch SNF 2010-07-17 07:46:20: Wafer-to-wafer etch rate is not constant   jjeong1 at snf.stanford.edu
• Problem stsetch SNF 2010-07-19 01:06:44: cover door issues again   jwpchen at snf.stanford.edu
• Problem stsetch SNF 2010-07-21 18:33:45: Cover interlock occasionally misreads OPEN   bchui at snf.stanford.edu
• Problem stsetch SNF 2010-07-28 18:37:11: software issue again   barlian at snf.stanford.edu
• Problem stsetch SNF 2010-07-31 07:39:03: transfer chamber pump slow   jwpchen at snf.stanford.edu
• Shutdown stsetch SNF 2010-07-13 16:48:23: Can't load wafer   bchui at snf.stanford.edu
• Shutdown stsetch SNF 2010-07-13 16:48:23: Can't load wafer   cbaxter at snf.stanford.edu

Last message date: Sat Jul 31 07:42:56 PDT 2010
Archived on: Fri Jan 11 13:11:24 PST 2013

• Messages sorted by: [ thread ] [ author ] [ date ]
• More info on this list...