Comment stsetch SNF 2010-06-08 23:28:46: wafer shattered but He looks ok
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Jun 9 09:07:57 PDT 2010
Recovered user's wafer pieces. Ran Deep recipe with no problems. Helium flow was 2.5 - 3.6
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