Problem stsetch SNF 2010-06-09 21:43:36: DON'T USE! STS is eating my wafers!

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jun 10 10:04:36 PDT 2010


Recovered the user's wafer and place it in his wafer box.  Found the wafer at the bottom of the chamber.  Ran the recipe that the user used and watch the wafer load and unload several times with no problem.




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