Shutdown stsetch SNF 2010-06-15 11:14:54: He issues

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Jun 15 11:14:55 PDT 2010


Ran new blank wafer.  He pressure was oscillating from 0.2 to 0.75.  Should be about 9.0-10.0.
He flow was 3.0 to 6.0.  Should be steady at 3.0.




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