Comment stsetch SNF 2010-06-15 16:37:21: Qual after He repair and clamp dot replaced

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Jun 15 16:37:21 PDT 2010


The springs for the clamp pips were replaced and the missing dot from the clamp finger was replaced
DEEP 00:10:00
Si ER = 1.97um/min
PR ER = 208A/min
Si : PR Sel = 95 : 1
Uniformity as usual;
Center = 18.8
Top = 20.6
Bottom = 19.4
Right = 20.3
Left  = 19.6
He was stable at; pressure = 9.79T and flow range was 1.79-1.82sccm




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