Shutdown stsetch SNF 2010-06-16 19:26:47: wafer broken in holder, please save my pieces!

xzhuan1 at xzhuan1 at
Wed Jun 16 19:26:47 PDT 2010

my wafer was broken during etching. pieces are still in the chamber. these pieces are extremely valbuable to me so please carefully save them for me. 

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