Shutdown stsetch SNF 2010-06-16 19:26:47: wafer broken in holder, please save my pieces!

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jun 17 08:38:29 PDT 2010


Recovered wafer pieces and placed them in the user's wafer holder.  Ran Deep recipe. Backside helium flow is 1.4 @9.8Torr




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