Shutdown stsetch SNF 2010-06-17 16:46:20: wafer broken in chamber again

xzhuan1 at xzhuan1 at
Thu Jun 17 16:46:20 PDT 2010

for a second time in a row, my wafer was broken in the process chamber during etching. I used the wafer holder, and was etching about 200um trenches in a 400 um thick wafer. please retrieve my pieces. they are extremely valuable to me. 

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