Shutdown stsetch SNF 2010-06-17 16:46:20: wafer broken in chamber again

[xzhuan1 at snf.stanford.edu]

for a second time in a row, my wafer was broken in the process chamber during etching. I used the wafer holder, and was etching about 200um trenches in a 400 um thick wafer. please retrieve my pieces. they are extremely valuable to me.