Comment stsetch SNF 2010-06-21 00:22:32: somebody's devices scattered in machine

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Mon Jun 21 00:22:32 PDT 2010


arrived at machine to see small 1-2mm square device flakes scattered on loader arm and inside chamber. ran a test wafer and saw He pressure of 6-7 (flow is still maxed) so machine is probably still ok to use. ideally the flakes should be cleaned up though




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