Problem stsetch SNF 2010-06-21 14:40:21: He flow fluctuates 3.5~6.5

popomoo at snf.stanford.edu popomoo at snf.stanford.edu
Mon Jun 21 14:40:22 PDT 2010


When I started to etch, He flow kept fluctuating from 3.5~6.5. I checked the wafer backside, but it looked clean. I also tried the wafer holder, but still fluctuated.... 




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