June 2010 Archives by thread

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Starting: Wed Jun 2 08:07:20 PDT 2010
Ending: Sat Jun 26 05:53:47 PDT 2010
Messages: 37

• Shutdown stsetch SNF 2010-06-02 08:07:20: Field service work   eenriquez at snf.stanford.edu
  • Shutdown stsetch SNF 2010-06-02 08:07:20: Field service work   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-05-07 21:20:38: broken piece outside the holding area   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-05-04 13:04:23: May qual   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-04-12 11:21:56: Monitor He flow   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-06-08 12:02:10: Qual after FSE   latta at snf.stanford.edu
• Problem stsetch SNF 2010-05-28 11:41:14:   latta at snf.stanford.edu
• Comment stsetch SNF 2010-05-28 11:41:18:   latta at snf.stanford.edu
• Problem stsetch SNF 2010-05-30 07:49:19: wafer broken, He pressure low   latta at snf.stanford.edu
• Problem stsetch SNF 2010-05-17 18:02:47: Helium pressure extremely low   latta at snf.stanford.edu
• Comment stsetch SNF 2010-05-28 15:02:33: Update He leak   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-05-26 09:17:52: icp exception during etching   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-05-21 15:24:14: Update He leak rate   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-05-09 19:27:44: He Pressure   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-05-09 19:31:01: He Pressure   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-06-08 23:28:46: wafer shattered but He looks ok   jwpchen at snf.stanford.edu
  • Comment stsetch SNF 2010-06-08 23:28:46: wafer shattered but He looks ok   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-06-09 21:43:36: DON'T USE! STS is eating my wafers!   damodei at snf.stanford.edu
  • Problem stsetch SNF 2010-06-09 21:43:36: DON'T USE! STS is eating my wafers!   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-06-13 14:56:21: etching is non-uniform   mtan at snf.stanford.edu
  • Problem stsetch SNF 2010-06-13 14:56:21: etching is non-uniform   latta at snf.stanford.edu
• Problem stsetch SNF 2010-06-14 14:48:07: More details of etch nonuniformity ....   shott at snf.stanford.edu
• Problem stsetch SNF 2010-06-14 16:38:49: Helium pressure negative   damodei at snf.stanford.edu
  • Problem stsetch SNF 2010-06-14 16:38:49: Helium pressure negative   latta at snf.stanford.edu
• Shutdown stsetch SNF 2010-06-15 11:14:54: He issues   latta at snf.stanford.edu
  • Shutdown stsetch SNF 2010-06-15 11:14:54: He issues   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-06-15 16:37:21: Qual after He repair and clamp dot replaced   latta at snf.stanford.edu
• Shutdown stsetch SNF 2010-06-16 19:26:47: wafer broken in holder, please save my pieces!   xzhuan1 at snf.stanford.edu
  • Shutdown stsetch SNF 2010-06-16 19:26:47: wafer broken in holder, please save my pieces!   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2010-06-17 16:46:20: wafer broken in chamber again   xzhuan1 at snf.stanford.edu
  • Shutdown stsetch SNF 2010-06-17 16:46:20: wafer broken in chamber again   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-06-21 00:22:32: somebody's devices scattered in machine   jwpchen at snf.stanford.edu
• Comment stsetch SNF 2010-06-21 04:23:13: pieces in chamber   jwpchen at snf.stanford.edu
• Problem stsetch SNF 2010-06-21 14:40:21: He flow fluctuates 3.5~6.5   popomoo at snf.stanford.edu
• Shutdown stsetch SNF 2010-06-22 11:20:07: Cooling He leak.   eenriquez at snf.stanford.edu
  • Shutdown stsetch SNF 2010-06-22 11:20:07: Cooling He leak.   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-06-26 05:53:47: SF6 MFC unstable   jwpchen at snf.stanford.edu

Last message date: Sat Jun 26 05:53:47 PDT 2010
Archived on: Fri Jan 11 13:11:24 PST 2013

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