Comment stsetch SNF 2010-03-03 19:35:15: small samples carcked/poped in the chamber but system runs ok

allenc at snf.stanford.edu allenc at snf.stanford.edu
Wed Mar 3 19:35:15 PST 2010


Using the wafer carrier for deep etch as being done many time without problem. The wafer cracked this time and few small pieces jumped to the side of chamer. The system is running ok with same ER (but ER is slower in this month compared to ER before Jan.). Still do not know why wafer cracked though.




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