Comment stsetch SNF 2010-03-06 15:18:23: sample pieces broken and sitting side of chamber

allenc at snf.stanford.edu allenc at snf.stanford.edu
Sat Mar 6 15:18:23 PST 2010


wafer borken on the wafer carrier again and some large pieces fall to side of chamber. Continue etching process on other wafer and still functioning ok. However, we may need to clean out the pieces later.. (high breken rate on this batch of wafer with same design from last year.. will try to check how to reduce the wafer breakage issue




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