Comment stsetch SNF 2010-03-15 16:01:32: etch rate increases back today

allenc at snf.stanford.edu allenc at snf.stanford.edu
Mon Mar 15 16:01:33 PDT 2010


using the wafer holder for etch. the pressure is only in range of ~9.2 with flow of ~5.1. However, somehow the etch rate is back to be similar to last year's value on my wafer. Not sure why..




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