Problem stsetch SNF 2010-03-18 17:32:01: He pressure low

allenc at snf.stanford.edu allenc at snf.stanford.edu
Thu Mar 18 17:32:02 PDT 2010

Previous message: Comment stsetch SNF 2010-03-15 16:01:32: etch rate increases back today
Next message: Problem stsetch SNF 2010-03-18 17:32:01: He pressure low
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Using wafer holder. the He pressure is in range of ~8.. (sometimes lower than 8).

Previous message: Comment stsetch SNF 2010-03-15 16:01:32: etch rate increases back today
Next message: Problem stsetch SNF 2010-03-18 17:32:01: He pressure low
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list