Problem stsetch SNF 2010-03-19 05:53:21: large wafer piece broken inside the machine

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 19 10:05:29 PDT 2010


Recovered the user's wafer and placed wafer pieces on the EPI1's front shelf.  Wet cleaned the electrode.  Ran O2 plasma.




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