Comment stsetch SNF 2010-03-22 14:55:58: Update backside He

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 22 14:55:58 PDT 2010


Replaced the top half of the wafer carrier.  Cleaned and polished the bottom half.  Also replaced the o-ring.  Backside He flow still jumps to ~ 4.6 sccm when any process gas valve opens.  Still need further troubleshooting but it looks like, we might have to redesign the wafer holder.




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