Comment stsetch SNF 2010-03-25 14:20:33: Update He leak rate

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 25 14:20:34 PDT 2010


The helium leak rate is very high.  He backside pressure can only go up to ~ 6 Torr even afer cleaning the electrode and replacing the lip seal.  Various tests indicated that the electrode assembly is leaking.
The plan is to rebuild the electrode starting next Monday and should be ready by Thursday morning.  Between now and Monday, users with non critical etches can use the tool if they wish.  Please run a process test before commiting your actual samples.




More information about the stsetch-pcs mailing list